Non-linear elastic-plastic behavior of the invert glass lithium phosphorous oxynitride (LiPON)
Micro and nano-scale mechanical behavior of network/ionic glasses is dictated by their composition and the number of constraints per structural unit. From this perspective, the glass LiPON presents the opportunity for enhancement of the microscale ductility due to its rather unconstrained orthophosphate structure. Here, we use instrumented nanoindentation with different tip geometries to investigate the mechanical response of LiPON glass. The results reveal that the elastic modulus of LiPON is not constant and depends on pressure. With the method utilizing spherical nanoindentation and continuous stiffness measurement (CSM) we determine the yield point of LiPON. We propose the Drucker-Prager type ofmore »